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CVD/ALD precursors

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CVD/ALD precursors

Product Structure Properties
OCTS
  • ㆍName : Octachlorotrisilane
  • ㆍCAS number : 13596-23-1
  • ㆍMolecular formula : Si3Cl8
  • ㆍPurity : 99.999% by ICP-MS
  • ㆍMolecular weight : 367.88 g/mol
  • ㆍMelting point : - ℃
  • ㆍBoiling point : 213-215 ℃
  • ㆍAppearance : Colorless liquid
NPCS
  • ㆍName : Tetrakis(trichlorosilyl)silane
  • ㆍCAS number : 50350-62-4
  • ㆍMolecular formula : Si5Cl12
  • ㆍPurity : 99.999% by ICP-MS
  • ㆍMolecular weight : 565.86 g/mol
  • ㆍMelting point : >300 ℃
  • ㆍBoiling point : 190 ℃
  • ㆍAppearance : Colorless crystals
TCDS
  • ㆍName : Tetrachlorodisilane
  • ㆍCAS number : 99995-72-9
  • ㆍMolecular formula : Si2H2Cl4
  • ㆍPurity : 99.999% by ICP-MS
  • ㆍMolecular weight : 199.96 g/mol
  • ㆍMelting point : - ℃
  • ㆍBoiling point : 29-30 ℃(35 hPa)
  • ㆍAppearance : Colorless liquid
PCDS
  • ㆍName : Pentachlorodisilane
  • ㆍCAS number : 31411-98-0
  • ㆍMolecular formula : Si2HCl5
  • ㆍPurity : 99.999% by ICP-MS
  • ㆍMolecular weight : 234.41 g/mol
  • ㆍMelting point : - ℃
  • ㆍBoiling point : 40-41 ℃(35 hPa)
  • ㆍAppearance : Colorless liquid
CHCS
  • ㆍName : Perchlorinated cyclo-hexasilane
  • ㆍCAS number : -
  • ㆍMolecular formula : Si6Cl12
  • ㆍPurity : 99.999% by ICP-MS
  • ㆍMolecular weight : 593.88 g/mol
  • ㆍMelting point : - ℃
  • ㆍBoiling point : - ℃
  • ㆍAppearance : Colorless crystals
HCDG
  • ㆍName : Hexachlorodigermane
  • ㆍCAS number : -
  • ㆍMolecular formula : Ge2Cl6
  • ㆍPurity : 99.999% by ICP-MS
  • ㆍMolecular weight : 358.00 g/mol
  • ㆍMelting point : 42 ℃
  • ㆍBoiling point : ~40 ℃/5hPa
  • ㆍAppearance : Colorless crystals
TEB
  • ㆍName : Triethylborate
  • ㆍCAS number : 150-46-9
  • ㆍMolecular formula : C6H15BO3
  • ㆍPurity : -
  • ㆍMolecular weight : 145.99 g/mol
  • ㆍMelting point : -85 ℃
  • ㆍBoiling point : 118 ℃
  • ㆍAppearance : Colorless liquid